Zhengzhou Kejia Furnace Co., Ltd Company Logo Zhengzhou Kejia Furnace Co., Ltd
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1600C PECVD Tube Furnace

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Zhengzhou Kejia Furnace Co., Ltd
[China]

Address
No12. Dongqing street, High-tech zone Zhengzhou Henan
Phone
86-0371-67826992
Contact name
Grace Liu

Quick Information

  • Brand Name: Kejia
  • Place of Origin: China
  • Model Number : KJ-T1600-P
  • Type : horizontal type
  • Application : analysis and sinering

Description

Kejia series PECVD tube furnace by nicrowave or radio frequency makes gas ionization containing film the constituent atoms, in a local plasma formation, and plasma chemical activity is very strong. It is easy to react, sedimentary out the desired film on substrate. It is most suitable for producing hgih quality sio2 film, si3N4 film, hard thin film, optical thim fim and CNY, etc.

Kejia PECVD is consist of one tube furnace, one gas system, one system and one plasma power.

 

Model Kejia sereies PECVD tube furnace
Max. temperature 1200/1400/1600C
Working temperature 1100/1300/1500C
Furnace chamber Imported high pure polycrystalline alumina 
fiber, excellent heat preservation
Furnace tube size Φ40/60/80/100*1200mm,etc
Heating element 200/300/400.etc.
Thermometric component K/S/B type 
Temperature control mode The temperature control system uses 
artificial intelligence technology, 
with 30 segments program PID control, self - tuning function,
cooling program
Seal mode Stainless steel KF fast water-cooled flange extrusion seal
Standard vacuum degree ≤50Pa(Conventional mechanical pump 
+ pointe pressure gauge)
≤10Pa(With high mechanical pump 
+ digital pressure gauge)
≤0.005Pa(Molecular pump system)
Gas control Float flow meter/ Mass flow meter
Plasma power 200/300/500/1000W
Constant temperature accuracy ±1C
Constant temperature zone length 220mm
Max. Temperature rising rate 20C/min
Optional parts Water chiller/digital vacuum guage
Heating elements Resistance wire with mo/Sic heater/MoSi2 heaters
Power supply 110-410v, 50/60Hz, single
Certification CE
Overall size 1100*880*700mm
Weight 350KG
Standard accessories Sealed water-cooled flange1 pcs, 
O-rings 4 pcs, alumina tube 1 pcs, 
vacuum pump 1 set,
 pipe plug 4 pcs, oven gloves, 
crucible tongs each 1 pcs
Optional purchase accessories Furnace hobs; Mixed gas system;
 Low, medium and high vacuum system; 
All kinds of alumina crucibles; Alumina tube; 
Computer control software;
 Paperless recorder, 
Cooling water circulation machine, etc.

Kejia FUrnace is a professional manufacturer of lab furnace in China, which integrated reaserch, produce and dale. It has much ecperience in the filed of lab furnace. including muffle furnace, tube furnace,atmosphere furnace, vacuum furnace, vacuum dirying oven, CVD tue furnace, etc.

Any inquiry pls feel free to contact me with the following information:
Contact: Grace Liu
Skype:protechgrace
Mobile: + 86 180 3712 3807
Email:sales01(@)kejiafurnace.com


Packaging & Delivery

  • Packing :1 set per box
  • Delivery Lead Time : 20 days after receiving your deposit
  • Supply Ability : 87 sets per sets

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