Model |
Kejia sereies PECVD tube furnace |
Max. temperature |
1200/1400/1600C |
Working temperature |
1100/1300/1500C |
Furnace chamber |
Imported high pure polycrystalline alumina
fiber, excellent heat preservation |
Furnace tube size |
Φ40/60/80/100*1200mm,etc |
Heating element |
200/300/400.etc. |
Thermometric component |
K/S/B type |
Temperature control mode |
The temperature control system uses
artificial intelligence technology,
with 30 segments program PID control, self - tuning function,
cooling program |
Seal mode |
Stainless steel KF fast water-cooled flange extrusion seal |
Standard vacuum degree |
≤50Pa(Conventional mechanical pump
+ pointe pressure gauge) |
≤10Pa(With high mechanical pump
+ digital pressure gauge) |
≤0.005Pa(Molecular pump system) |
Gas control |
Float flow meter/ Mass flow meter |
Plasma power |
200/300/500/1000W |
Constant temperature accuracy |
±1C |
Constant temperature zone length |
220mm |
Max. Temperature rising rate |
20C/min |
Optional parts |
Water chiller/digital vacuum guage |
Heating elements |
Resistance wire with mo/Sic heater/MoSi2 heaters |
Power supply |
110-410v, 50/60Hz, single |
Certification |
CE |
Overall size |
1100*880*700mm |
Weight |
350KG |
Standard accessories |
Sealed water-cooled flange1 pcs,
O-rings 4 pcs, alumina tube 1 pcs,
vacuum pump 1 set,
pipe plug 4 pcs, oven gloves,
crucible tongs each 1 pcs |
Optional purchase accessories |
Furnace hobs; Mixed gas system;
Low, medium and high vacuum system;
All kinds of alumina crucibles; Alumina tube;
Computer control software;
Paperless recorder,
Cooling water circulation machine, etc. |